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Synthesis of highly conductive cobalt thin films by LCVD at atmospheric pressureGo to Link

Jeong, Kyunghoon; Lee, Jiwon; Byun, Injae; Seong, Myung-jun; Park, Jongsoo; Kim, Hyoun Woo; Kim, Moon J.; Kim, Jae-Hun; Lee, Jaegab

ArticleIssue Date2017CitationMaterials Science in Semiconductor Processing, v.68, pp 245 - 251PublisherPergamon Press
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