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Proximity Gettering Design of Silicon Wafers Using Hydrocarbon Molecular Ion Implantation Technique for Advanced CMOS Image SensorsGo to Link

Kurita, Kazunari; Kadono, Takeshi; Shigematsu, Satoshi; Hirose, Ryo; Okuyama, Ryosuke; Onaka-Masada, Ayumi; Okuda, Hidehiko; Koga, Yoshihiro; Park, Jea-Gun

ArticleIssue Date2018CitationProceedings of the International Conference on Ion Implantation Technology, v.2018, no.September, pp.275 - 286PublisherInstitute of Electrical and Electronics Engineers Inc.
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