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A study of crack detection in silicon wafer using laser generated Lamb waveGo to Link

Song, Min-Kyoo; Lee, Hyeon; Yun, Dong-Seok; Jhang, Kyung-Young

ArticleIssue Date2014CitationAIP Conference Proceedings, v.1581 33, pp 1122 - 1125PublisherAmerican Institute of Physics
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Crack Detection in Single-Crystalline Silicon Wafer Using Laser Generated Lamb WaveGo to Link

Song, Min-Kyoo; Jhang, Kyung-Young

ArticleIssue Date2013CitationAdvances in Materials Science and Engineering, v.2013, pp 1 - 7PublisherHindawi Publishing Corporation
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