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Unveiling the Hybrid-Channel (poly-Si/IGO) Structure for 3D NAND Flash Memory for Improving the Cell Current and GIDL-Assisted Erase OperationGo to Linkopen access

Choi, Su-Hwan; Sim, Jae-Min; Shin, Jeongmin; Ryu, Seong-Hwan; Hwang, Taewon; Lim, So Young; Oh, Hye-Jin; Kwag, Jae-Hyeok; Lee, Jun-Yeoub; Song, Ki-Cheol, et al.

ArticleIssue Date2025CitationSMALL STRUCTURES, v.6, no.5, pp 1 - 10PublisherWILEY-V C H VERLAG GMBH
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