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Fenton Reaction for Enhancing Polishing Rate and Protonated Amine Functional Group Polymer for Inhibiting Corrosion in Ge1Sb4Te5 Film Surface Chemical-Mechanical-PlanarizationGo to Linkopen access

Jeong, Gi-Ppeum; Son, Young-Hye; Park, Jun-Seong; Kim, Pil-Su; Han, Man-Hyup; Hong, Seong-Wan; Park, Jin-Hyung; Cui, Hao; Yoon, Bo-Un; Park, Jea-Gun

ArticleIssue Date2021CitationAPPLIED SCIENCES-BASEL, v.11, no.22, pp.1 - 14PublisherMDPI
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