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Effect of RF Pulsing Biasing on the Etching of Magnetic Tunnel Junction Materials Using CH3OHGo to Link

Jeon, Min Hwan; Yun, Deok Hyun; Yang, Kyung Chae; Youn, Ji Youm; Lee, Du Yeong; Shim, Tae Hun; Park, Jea Gun; Yeom, Geun Young

ArticleIssue Date2014CitationJournal of Nanoscience and Nanotechnology, v.14, no.12, pp 9680 - 9685PublisherAmerican Scientific Publishers
SCISCIESCOPUS
Etch Characteristics of Magnetic Tunnel Junction Materials Using Bias Pulsing in the CH4/N2O Inductively Coupled PlasmaGo to Link

Jeon, Min Hwan; Youn, Ji Youn; Yang, Kyung Chae; Yun, Deok Hyun; Lee, Du Yeong; Shim, Tae Hun; Park, Jea Gun; Yeom, Geun Young

ArticleIssue Date2014CitationJournal of Nanoscience and Nanotechnology, v.14, no.12, pp 9541 - 9547PublisherAmerican Scientific Publishers
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