ScholarWorks Collection: https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/234 2026-07-04T00:32:06Z 2026-07-04T00:32:06Z Vapor-Phase Dry Development Enabling High-Resolution and Improved CDU in EUV Photoresists 안진호 https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/213652 2026-06-27T18:31:36Z 2026-02-25T00:00:00Z Title: Vapor-Phase Dry Development Enabling High-Resolution and Improved CDU in EUV Photoresists Authors: 안진호 2026-02-25T00:00:00Z Reliable actinic mask evaluation via high-frequency signal enhancement in EUV ptychography 안진호 https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/213639 2026-06-27T18:31:39Z 2026-02-25T00:00:00Z Title: Reliable actinic mask evaluation via high-frequency signal enhancement in EUV ptychography Authors: 안진호 2026-02-25T00:00:00Z Resolution enhancement in EUV ptychography via optimized probe overlap ratio for diffraction diversity 안진호 https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/213638 2026-06-27T18:31:37Z 2026-02-25T00:00:00Z Title: Resolution enhancement in EUV ptychography via optimized probe overlap ratio for diffraction diversity Authors: 안진호 2026-02-25T00:00:00Z Resolution Enhancement in EUV Ptychography via Optimized Probe Overlap Ratio for Diffraction Diversity 안진호 https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/213647 2026-06-27T18:31:28Z 2026-02-06T00:00:00Z Title: Resolution Enhancement in EUV Ptychography via Optimized Probe Overlap Ratio for Diffraction Diversity Authors: 안진호 2026-02-06T00:00:00Z