Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Remote plasma atomic layer deposition of SiNx gate spacer using BDEAS and N2 plasma
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2022-02-03T01:56:35Z | - |
| dc.date.available | 2022-02-03T01:56:35Z | - |
| dc.date.issued | 20211118 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/134236 | - |
| dc.title | Remote plasma atomic layer deposition of SiNx gate spacer using BDEAS and N2 plasma | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2021년 추계학술대회 | - |
| dc.citation.conferencePlace | 용인문화예술원 | - |
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Jeon, Hyeongtag
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)