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Characterization of Al doped SnO2 thin films with various doping positions atomic layer deposition
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2022-02-08T01:50:22Z | - |
| dc.date.available | 2022-02-08T01:50:22Z | - |
| dc.date.issued | 2021-06-28 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/134937 | - |
| dc.title | Characterization of Al doped SnO2 thin films with various doping positions atomic layer deposition | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | ALD 2021 21st international conference on atomic layer deposition | - |
| dc.citation.conferencePlace | 온라인 진행 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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