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Thermal atomic layer deposition of Molybdenum trioxide using metal organic precursor and H2O reactant
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2022-02-09T04:18:45Z | - |
| dc.date.available | 2022-02-09T04:18:45Z | - |
| dc.date.issued | 2021-05-13 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/135127 | - |
| dc.title | Thermal atomic layer deposition of Molybdenum trioxide using metal organic precursor and H2O reactant | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2021년도 한국재료학회 춘계학술대회 | - |
| dc.citation.conferencePlace | 광주 김대중 컨벤션센터(온라인 병행) | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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