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Inductively coupled plasma sources for photoresist ashing
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김주호 | - |
| dc.date.accessioned | 2022-03-24T09:05:46Z | - |
| dc.date.available | 2022-03-24T09:05:46Z | - |
| dc.date.created | 2022-03-05 | - |
| dc.date.issued | 2021-08-19 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/135745 | - |
| dc.publisher | The Korean Vacuum Society | - |
| dc.title | Inductively coupled plasma sources for photoresist ashing | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 김주호 | - |
| dc.identifier.bibliographicCitation | The 61st Summer Annual Conference of The Korean Vacuum Society | - |
| dc.relation.isPartOf | The 61st Summer Annual Conference of The Korean Vacuum Society | - |
| dc.citation.title | The 61st Summer Annual Conference of The Korean Vacuum Society | - |
| dc.citation.conferencePlace | 소노캄(제주) | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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Related Researcher
- Kim, Ju Ho
- COLLEGE OF ENGINEERING (서울 전기·생체공학부)