Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
이중주파수 유도결합 플라즈마에서 모드전이 연구
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김주호 | - |
| dc.date.accessioned | 2022-03-24T09:08:23Z | - |
| dc.date.available | 2022-03-24T09:08:23Z | - |
| dc.date.issued | 2021-02-05 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/135887 | - |
| dc.title | 이중주파수 유도결합 플라즈마에서 모드전이 연구 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | The 60th Winter Annual Conference of The Korean Vacuum Society | - |
| dc.citation.conferencePlace | 소노캄(제주) | - |
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > ETC > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.