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이중주파수 유도결합 플라즈마에서 모드전이 연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김주호 | - |
| dc.date.accessioned | 2022-03-24T09:08:23Z | - |
| dc.date.available | 2022-03-24T09:08:23Z | - |
| dc.date.created | 2022-03-05 | - |
| dc.date.issued | 2021-02-05 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/135887 | - |
| dc.publisher | The Korean Vacuum Society | - |
| dc.title | 이중주파수 유도결합 플라즈마에서 모드전이 연구 | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 김주호 | - |
| dc.identifier.bibliographicCitation | The 60th Winter Annual Conference of The Korean Vacuum Society | - |
| dc.relation.isPartOf | The 60th Winter Annual Conference of The Korean Vacuum Society | - |
| dc.citation.title | The 60th Winter Annual Conference of The Korean Vacuum Society | - |
| dc.citation.conferencePlace | 소노캄(제주) | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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Related Researcher
- Kim, Ju Ho
- COLLEGE OF ENGINEERING (서울 전기·생체공학부)