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Experimental investigation on capacitively coupled plasma source using a passive resonant antenna
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김주호 | - |
| dc.date.accessioned | 2022-04-01T09:32:54Z | - |
| dc.date.available | 2022-04-01T09:32:54Z | - |
| dc.date.issued | 2020-10-06 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/136116 | - |
| dc.title | Experimental investigation on capacitively coupled plasma source using a passive resonant antenna | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 73rd Annual Gaseous Electronics Virtual Conference | - |
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