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Electrical Characteristics of Inductively Coupled Plasma Sources using Magnetic Resonance Wireless Power Transmission System
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김주호 | - |
| dc.date.accessioned | 2022-04-01T09:32:55Z | - |
| dc.date.available | 2022-04-01T09:32:55Z | - |
| dc.date.issued | 2020-08-20 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/136117 | - |
| dc.title | Electrical Characteristics of Inductively Coupled Plasma Sources using Magnetic Resonance Wireless Power Transmission System | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | THE 59th SUMMER ANNUAL CONFERENCE OF THE KOREAN VACUUM SOCIETY | - |
| dc.citation.conferencePlace | 소노캄(제주) | - |
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