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Experimantal observation of hysteresis in a neon inductively coupled plasma at low pressure
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김주호 | - |
| dc.date.accessioned | 2022-07-04T05:10:08Z | - |
| dc.date.available | 2022-07-04T05:10:08Z | - |
| dc.date.issued | 2022-04-27 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/137618 | - |
| dc.title | Experimantal observation of hysteresis in a neon inductively coupled plasma at low pressure | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | Plasma Processing and Technology International Conference 2022 | - |
| dc.citation.conferencePlace | Barcelona | - |
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