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CAAC-IGZO 채널을 적용한 3D NAND Flash cell 공정 조건 연구

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dc.contributor.author송윤흡-
dc.date.accessioned2022-07-04T07:55:50Z-
dc.date.available2022-07-04T07:55:50Z-
dc.date.issued2021-06-30-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/138246-
dc.titleCAAC-IGZO 채널을 적용한 3D NAND Flash cell 공정 조건 연구-
dc.typeConference-
dc.citation.conferenceName2021년 대한전자공학회 하계종합학술대회-
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서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers

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