Three-dimensional electrostatic capacitors as futuristic miniaturized energy storage component for energy autonomous systems

Abstract

For the integration of ambient energy sources into implantable/wearable microelectronics, the development of efficient and high-power energy storage devices is essential (such as electrostatic or dielectric capacitors). In light of the general need for small components for energy storage devices, the development of fluorite-based three-dimensional structured electrostatic capacitors is expected to open new paths for the future development of on-chip energy storage, especially because of their enhanced capacity at low deposition thicknesses (in nanometers).