Molecular Layer Deposition of Organic-Inorganic Hybrid Films Using Diethylzinc and Trihydroxybenzene

Abstract

We fabricated organic-inorganic hybrid thin films by using molecular layer deposition with diethylzinc and benzenetriol at temperatures of 100-160 degrees C. In this MLD process, the surface reactions were found to be self-terminating and complementary enough to make a uniform, conformal, high-quality hybrid thin film. The prepared zinc oxide-crosslinked hydroxybenzene and zinc oxide nanolaminated films (ZnOHB/ZnO) exhibited good stability and field effect mobility (> 0.6 cm(2)/V . s). The MLD method is an ideal technique for fabrication of various organic-inorganic hybrid thin films.