Influence of titanium adhesion layer on performance of beta-Ga2O3 solar-blind photodetectorInfluence of titanium adhesion layer on performance of β-Ga2O3 solar-blind photodetector
- Other Titles
- Influence of titanium adhesion layer on performance of β-Ga2O3 solar-blind photodetector
- Authors
- Vu, Thi Kim Oanh; Lee, Dong Uk; Kim, Eun Kyu
- Issue Date
- Sep-2020
- Publisher
- ELSEVIER SCIENCE SA
- Keywords
- beta-Ga2O3; Solar-blind photodetector; Titanium adhesion layer; Pulsed laser deposition
- Citation
- MATERIALS CHEMISTRY AND PHYSICS, v.252, pp.1 - 9
- Indexed
- SCIE
SCOPUS
- Journal Title
- MATERIALS CHEMISTRY AND PHYSICS
- Volume
- 252
- Start Page
- 1
- End Page
- 9
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/145196
- DOI
- 10.1016/j.matchemphys.2020.123248
- ISSN
- 0254-0584
- Abstract
- The influence of a titanium (Ti) adhesion layer on the ductility of thin Au film well bonded with beta-Ga2O3 film on a flexible substrate were investigated with the quality of beta-Ga2O3 deep-ultraviolet photodetector. The photodetector fabricated with Ti adhesion layer exhibits excellent photoelectric performance and stability. The photocurrent obtained by the Ti/Au bilayer-device (3.1 x 10(-8) A) is significantly greater than that of an Au electrode-device (1.7 x 10(-8) A) at 10 V under a flat state. After 250 bending cycles, the photoresponsivity of the Au electrode-device declined approximately 20 times, while little photoresponsivity degradation was observed in the Ti/Au bilayer-device. Additionally, more suppression of the deformation and cracks was observed in the Au film with Ti adhesion layer than the Au grown directly on the beta-Ga2O3 films. These results reveal the importance of the adhesion layer in promoting the photodetector.
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