Realization of Spatially Addressable Library by a Novel Combinatorial Approach on Atomic Layer Deposition: A Case Study of Zinc Oxide
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Harrison Sejoon | - |
dc.contributor.author | Lee, Joy S. | - |
dc.contributor.author | Kim, Si Joon | - |
dc.contributor.author | Lee, Jaebeom | - |
dc.contributor.author | Lucero, Antonio T. | - |
dc.contributor.author | Sung, Myung Mo | - |
dc.contributor.author | Kim, Jiyoung | - |
dc.date.accessioned | 2022-07-09T14:05:37Z | - |
dc.date.available | 2022-07-09T14:05:37Z | - |
dc.date.created | 2021-05-12 | - |
dc.date.issued | 2019-06 | - |
dc.identifier.issn | 2156-8952 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/147676 | - |
dc.description.abstract | Though the synthesis of libraries of multi-component metal oxide systems is prevalent using the combinatorial approach, the combinatorial approach has been rarely realized in studying simple metal oxides, especially applied to the atomic layer deposition (ALD) technique. In this literature, a novel combinatorial approach technique is utilized within an ALD grown simple metal oxide to synthesize a "spatially addressable combinatorial library". The two key factors in gradients were defined during the ALD process: (1) the process temperature and (2) a nonuniform flow of pulsed gases inside a cross-flow reactor. To validate the feasibility of our novel combinatorial approach, a case study of zinc oxide (ZnO), a simple metal oxide whose properties are well-known, is performed. Because of the induced gradient, the ZnO (002) crystallite size was found to gradually vary across a 100 mm wafer (similar to 10-20 nm) with a corresponding increase in the normalized Raman E-2/A(1) peak intensity ratio. The findings agree well with the visible grain size observed from scanning electron microscope. The novel combinatorial approach provides a means of systematical interpretation of the combined effect of the two gradients, especially in the analysis of the microstructure of ZnO crystals. Moreover, the combinatorial library reveals that the process temperature, rather than the crystal size, plays the most significant role in determining the electrical conductivity of ZnO. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | AMER CHEMICAL SOC | - |
dc.title | Realization of Spatially Addressable Library by a Novel Combinatorial Approach on Atomic Layer Deposition: A Case Study of Zinc Oxide | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Sung, Myung Mo | - |
dc.identifier.doi | 10.1021/acscombsci.9b00007 | - |
dc.identifier.scopusid | 2-s2.0-85067059220 | - |
dc.identifier.wosid | 000471211900002 | - |
dc.identifier.bibliographicCitation | ACS COMBINATORIAL SCIENCE, v.21, no.6, pp.445 - 455 | - |
dc.relation.isPartOf | ACS COMBINATORIAL SCIENCE | - |
dc.citation.title | ACS COMBINATORIAL SCIENCE | - |
dc.citation.volume | 21 | - |
dc.citation.number | 6 | - |
dc.citation.startPage | 445 | - |
dc.citation.endPage | 455 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Chemistry | - |
dc.relation.journalResearchArea | Pharmacology & Pharmacy | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Applied | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Medicinal | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Multidisciplinary | - |
dc.subject.keywordPlus | PULSED-LASER DEPOSITION | - |
dc.subject.keywordPlus | ZNO THIN-FILMS | - |
dc.subject.keywordPlus | CHEMICAL-VAPOR-DEPOSITION | - |
dc.subject.keywordPlus | MOLECULAR-BEAM EPITAXY | - |
dc.subject.keywordPlus | RAMAN-SCATTERING | - |
dc.subject.keywordPlus | PHOTOLUMINESCENCE PROPERTIES | - |
dc.subject.keywordPlus | COMPOSITIONAL SPREADS | - |
dc.subject.keywordPlus | GROWN ZNO | - |
dc.subject.keywordPlus | TEMPERATURE | - |
dc.subject.keywordPlus | HYDROGEN | - |
dc.subject.keywordAuthor | spatially addressable library | - |
dc.subject.keywordAuthor | combinatorial materials science | - |
dc.subject.keywordAuthor | temperature gradient | - |
dc.subject.keywordAuthor | atomic layer deposition (ALD) | - |
dc.subject.keywordAuthor | zinc oxide (ZnO) | - |
dc.subject.keywordAuthor | crystallinity | - |
dc.identifier.url | https://pubs.acs.org/doi/10.1021/acscombsci.9b00007 | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
222, Wangsimni-ro, Seongdong-gu, Seoul, 04763, Korea+82-2-2220-1365
COPYRIGHT © 2021 HANYANG UNIVERSITY.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.