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Cold Plasma Processing and Plasma Chemistry of Metallic Cobalt Surface
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Jeon, Sang Hwan
; Kim, Yong Soo; Jung, Chong Hun
Article
Issue Date
2008
Citation
PLASMA CHEMISTRY AND PLASMA PROCESSING, v.28, no.5, pp.617 - 628
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SPRINGER
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Jung, Chong Hun
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JEON, SANG HWAN
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Kim, Yong Soo
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Cobalt
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Cobalt fluoride
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Cold plasma
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DECONTAMINATION
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DISCHARGE
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Metallic surface decontamination
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REMOVAL
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RF PLASMA
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SF6/O-2
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URANIUM-DIOXIDE
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