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금속표면 제염을 위한 코발트의 플라즈마 식각반응연구
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전상환
; 김용수
Article
Issue Date
2008
Citation
방사성폐기물학회지, v.6, no.1, pp.17 - 23
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한국방사성폐기물학회
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JEON, SANG HWAN
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Kim, Yong Soo
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cobalt
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Metal surface decontamination
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reactive plasma etching
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금속표면제염
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반응성 플라즈마 식각
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오제전자분광법
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코발트
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