Nanophotonic identification of defects buried in three-dimensional NAND flash memory devices
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Yoon, Jae Woong | - |
dc.contributor.author | Ma, Seong-Min | - |
dc.contributor.author | Kim, Gun Pyo | - |
dc.contributor.author | Kang, Yoonshik | - |
dc.contributor.author | Hahn, Joonseong | - |
dc.contributor.author | Kwon, Oh-Jang | - |
dc.contributor.author | Kim, Kyuyoung | - |
dc.contributor.author | Song, Seok Ho | - |
dc.date.accessioned | 2022-07-12T17:16:06Z | - |
dc.date.available | 2022-07-12T17:16:06Z | - |
dc.date.created | 2021-05-12 | - |
dc.date.issued | 2018-01 | - |
dc.identifier.issn | 2520-1131 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/150726 | - |
dc.description.abstract | Advances in nanophotonics and plasmonics have led to the creation of a variety of innovative optical components and devices. However, the development of powerful practical applications has so far been limited. Here we show that subsurface defects in three-dimensional NAND flash memory devices can be identified by exploiting the inherent hyperbolic metamaterial structure of the devices and associated nanophotonic interactions, such as the epsilon-near-zero effect and hyperbolic Bloch mode formation. By incorporating a hyperspectral imaging scheme into an industrial optical inspection tool, we experimentally demonstrate that a diffraction-assisted volume-plasmonic resonance provides a robust mechanism for identifying subsurface defects at a depth that is around ten times deeper than the conventional optical skin depth limit. Further spectral analysis in the longer-wavelength infrared region shows clear hyperbolic guided-mode-resonance signatures that would potentially allow defect identification over the entire device depth and on the scale of multiple micrometres. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | NATURE RESEARCH | - |
dc.title | Nanophotonic identification of defects buried in three-dimensional NAND flash memory devices | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Yoon, Jae Woong | - |
dc.contributor.affiliatedAuthor | Song, Seok Ho | - |
dc.identifier.doi | 10.1038/s41928-017-0007-7 | - |
dc.identifier.scopusid | 2-s2.0-85056210348 | - |
dc.identifier.wosid | 000444072200016 | - |
dc.identifier.bibliographicCitation | NATURE ELECTRONICS, v.1, no.1, pp.60 - 67 | - |
dc.relation.isPartOf | NATURE ELECTRONICS | - |
dc.citation.title | NATURE ELECTRONICS | - |
dc.citation.volume | 1 | - |
dc.citation.number | 1 | - |
dc.citation.startPage | 60 | - |
dc.citation.endPage | 67 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
dc.subject.keywordPlus | LIGHT | - |
dc.subject.keywordPlus | TRANSMISSION | - |
dc.identifier.url | https://www.nature.com/articles/s41928-017-0007-7 | - |
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