Fabrication of Three-Dimensional Single-Walled Carbon Nanotube Networks Suspended on Si Pillar Architecture

Abstract

We synthesized three-dimensional (3-D) SWNT networks suspended on Si pillar architecture. The pillar arrays on Si substrate were formed by a standard photolithography technique using a patterned chrome mask and plasma etching in a SF6:C4F8 gas mixture. Successively, 3-D SWNT networks were synthesized between pillar arrays by a thermal chemical vapor deposition. We investigated the optical properties and formation of 3-D SWNT networks suspended on Si pillar arrays through controlling catalyst deposition methods between pillar arrays by using scanning electron microscopy and Raman spectroscopy. We confirmed that the bridging and connecting of SWNTs between Si pillars, suggesting the effective growth of the 3-D SWNT networks on Si pillar architecture for application to large scale and well-organized devices.