ScholarWorks@Hanyang University

Detailed Information

Cited 0 time in webofscience Cited 0 time in scopus
Metadata Downloads

High throughput and scalable spatial atomic layer deposition of Al2O3 as a moisture barrier for flexible OLED display

Full metadata record
DC Field Value Language
dc.contributor.authorChoi, Hagyoung-
dc.contributor.authorShin, Seokyooon-
dc.contributor.authorChoi, Yonghyuk-
dc.contributor.authorChoi, Yeongtae-
dc.contributor.authorKim, Junghun-
dc.contributor.authorKim, Sanghun-
dc.contributor.authorKim, Hyungkyu-
dc.contributor.authorPark, Jongsik-
dc.contributor.authorChung, Seog Chul-
dc.contributor.authorJeon, Hyeong tag-
dc.contributor.authorOh, Kiyoung-
dc.date.accessioned2022-07-15T22:45:32Z-
dc.date.available2022-07-15T22:45:32Z-
dc.date.issued2015-06-
dc.identifier.issn0097-966X-
dc.identifier.issn2168-0159-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/157153-
dc.description.abstractWe have developed high throughput and scalable space divided atomic layer deposition (ALD) system for thin film encapsulation (TFE) of flexible OLEDs display. In this paper, we report high moisture barrier properties of Al2O3 films deposited by our new developed high throughput (70 Å/min) spatial ALD with 2G glass substrate size (370 × 470 mm2). The WVTR on flexible substrate could achieve ∼10-5 g/m2 -day under tritium test.-
dc.format.extent4-
dc.language영어-
dc.language.isoENG-
dc.titleHigh throughput and scalable spatial atomic layer deposition of Al2O3 as a moisture barrier for flexible OLED display-
dc.typeArticle-
dc.identifier.doi10.1002/sdtp.10378-
dc.identifier.scopusid2-s2.0-84962815703-
dc.identifier.bibliographicCitationDigest of Technical Papers - SID International Symposium, v.46, no.Book 2, pp 1043 - 1046-
dc.citation.titleDigest of Technical Papers - SID International Symposium-
dc.citation.volume46-
dc.citation.numberBook 2-
dc.citation.startPage1043-
dc.citation.endPage1046-
dc.type.docTypeConference Paper-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClassscopus-
dc.subject.keywordPlusAlumina-
dc.subject.keywordPlusAluminum oxide-
dc.subject.keywordPlusFlexible displays-
dc.subject.keywordPlusMoisture-
dc.subject.keywordPlusOrganic light emitting diodes (OLED)-
dc.subject.keywordPlusSubstrates-
dc.subject.keywordPlusThin films-
dc.subject.keywordPlusBarrier films-
dc.subject.keywordPlusFlexible substrate-
dc.subject.keywordPlusGlass substrates-
dc.subject.keywordPlusHigh throughput-
dc.subject.keywordPlusMoisture barriers-
dc.subject.keywordPlusOLED-
dc.subject.keywordPlusThin film encapsulation-
dc.subject.keywordPlusWVTR-
dc.subject.keywordPlusAtomic layer deposition-
dc.subject.keywordAuthorALD-
dc.subject.keywordAuthorBarrier films-
dc.subject.keywordAuthorOLED-
dc.subject.keywordAuthorTFE-
dc.subject.keywordAuthorWVTR-
dc.identifier.urlhttps://sid.onlinelibrary.wiley.com/doi/10.1002/sdtp.10378-
Files in This Item
Go to Link
Appears in
Collections
서울 공과대학 > 서울 신소재공학부 > 1. Journal Articles
Show simple item record

qrcode

Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.

Altmetrics

Total Views & Downloads

CONTACT US

RSS_1.0 RSS_2.0 ATOM_1.0

222, Wangsimni-ro, Seongdong-gu, Seoul, 04763, Korea+82-2-2220-1366

COPYRIGHT © 2024 HANYANG UNIVERSITY.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.

BROWSE

한국어