Atomic layer deposition of HfO2 thin films using H2O2 as oxidant
DC Field | Value | Language |
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dc.contributor.author | Choi, Min-Jung | - |
dc.contributor.author | Park, Hyung-Ho | - |
dc.contributor.author | Jeong, Doo Seok | - |
dc.contributor.author | Kim, Jeong Hwan | - |
dc.contributor.author | Kim, Jin-Sang | - |
dc.contributor.author | Kim, Seong Keun | - |
dc.date.accessioned | 2022-07-16T04:47:06Z | - |
dc.date.available | 2022-07-16T04:47:06Z | - |
dc.date.created | 2021-05-13 | - |
dc.date.issued | 2014-05 | - |
dc.identifier.issn | 0169-4332 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/159956 | - |
dc.description.abstract | HfO 2 films were deposited by atomic layer deposition (ALD) using Hf[(C 2 H 5 )(CH 3 )N] 4 and H 2 O 2 at a temperature range of 175-325 °C. The growth per cycle of the HfO 2 films decreased with increasing temperature up to 280 °C and then abruptly increased above 325 °C as a result of the thermal decomposition of the precursor. Although the HfO 2 films grown with H 2 O 2 exhibited slightly higher carbon contents than those grown with H 2 O, the leakage properties of the HfO 2 films grown with H 2 O 2 were superior to those of the HfO 2 films grown with H 2 O. This is because the HfO 2 films grown with H 2 O 2 were fully oxidized as a result of the strong oxidation potential of H 2 O 2 . The use of the ALD process with H 2 O 2 also revealed the conformal growth of HfO 2 films on a SiO 2 hole structure with an aspect ratio of ∼15. This demonstrates that using the ALD process with H 2 O 2 shows great promise for growing robust HfO 2 films. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | ELSEVIER | - |
dc.title | Atomic layer deposition of HfO2 thin films using H2O2 as oxidant | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Jeong, Doo Seok | - |
dc.identifier.doi | 10.1016/j.apsusc.2014.02.098 | - |
dc.identifier.scopusid | 2-s2.0-84897914255 | - |
dc.identifier.wosid | 000335095600066 | - |
dc.identifier.bibliographicCitation | APPLIED SURFACE SCIENCE, v.301, pp.451 - 455 | - |
dc.relation.isPartOf | APPLIED SURFACE SCIENCE | - |
dc.citation.title | APPLIED SURFACE SCIENCE | - |
dc.citation.volume | 301 | - |
dc.citation.startPage | 451 | - |
dc.citation.endPage | 455 | - |
dc.type.rims | ART | - |
dc.type.docType | 정기학술지(Article(Perspective Article포함)) | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Chemistry | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Physical | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Coatings & Films | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
dc.subject.keywordPlus | DOPED TIO2 FILMS | - |
dc.subject.keywordPlus | OXIDES | - |
dc.subject.keywordPlus | O-3 | - |
dc.subject.keywordAuthor | Atomic layer deposition | - |
dc.subject.keywordAuthor | HfO2 | - |
dc.subject.keywordAuthor | H2O2 | - |
dc.identifier.url | https://www.sciencedirect.com/science/article/pii/S0169433214004024?via%3Dihub | - |
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