Permeation barrier properties of an Al2O3/ZrO2 multilayer deposited by remote plasma atomic layer deposition
DC Field | Value | Language |
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dc.contributor.author | Lee, Sanghun | - |
dc.contributor.author | Choi, Hagyoung | - |
dc.contributor.author | Shin, Seokyoon | - |
dc.contributor.author | Park, Joohyun | - |
dc.contributor.author | Ham, Giyul | - |
dc.contributor.author | Jung, Hyunsoo | - |
dc.contributor.author | Jeon, Hyeongtag | - |
dc.date.accessioned | 2022-07-16T05:23:24Z | - |
dc.date.available | 2022-07-16T05:23:24Z | - |
dc.date.created | 2021-05-12 | - |
dc.date.issued | 2014-04 | - |
dc.identifier.issn | 1567-1739 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/160288 | - |
dc.description.abstract | We report the permeation barrier properties of Al2O3/ZrO2 multi-layers deposited by remote plasma atomic layer deposition. Electrical Ca degradation tests were performed to derive the water vapor transmission rate (WVTR) of Al2O3, ZrO2 and Al2O3/ZrO2 multi-layers at 50 degrees C and 50% relative humidity (RH). Al2O3/ZrO2 multi-layers exhibit better barrier properties than Al2O3 and ZrO2 layers, and when more individual layers were deposited in the same total thickness, the WVTR value was reduced further, indicating a better barrier property. The WVTR of the Al2O3 and ZrO2 layers were 9.5 x 10(-3) and 1.6 x 10(-2) g/m(2) day, respectively, but when deposited alternatively with 1 cycle of each layer, the WVTR decreased to 9.9 x 10(-4) g/m(2) day. X-ray diffraction results indicated that ZrO2 has a monoclinic structure but Al2O3 and Al2O3/ZrO2 multi-layers show an amorphous structure. Cross sectional Al2O3/ZrO2 multilayer structures and the formation of a ZrAlxOy phase are observed by transmission electron microscopy (TEM). X-ray photoelectron spectrometry (XPS) results indicate that Al2O3 and ZrO2 contain 33.7% and 37.8%, respectively, Al-OH and Zr-OH bonding. However, the ZrAlxOy phase contained 30.5% Al-OH and Zr-OH bonding. The results of transmittance measurement indicate that overall, Al2O3, ZrO2 and Al2O3/ZrO2 multi-layers show high transmittance greater than 80% in the visible region. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | ELSEVIER SCIENCE BV | - |
dc.title | Permeation barrier properties of an Al2O3/ZrO2 multilayer deposited by remote plasma atomic layer deposition | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Jeon, Hyeongtag | - |
dc.identifier.doi | 10.1016/j.cap.2013.11.053 | - |
dc.identifier.scopusid | 2-s2.0-84894227141 | - |
dc.identifier.wosid | 000333977100006 | - |
dc.identifier.bibliographicCitation | CURRENT APPLIED PHYSICS, v.14, no.4, pp.552 - 557 | - |
dc.relation.isPartOf | CURRENT APPLIED PHYSICS | - |
dc.citation.title | CURRENT APPLIED PHYSICS | - |
dc.citation.volume | 14 | - |
dc.citation.number | 4 | - |
dc.citation.startPage | 552 | - |
dc.citation.endPage | 557 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.identifier.kciid | ART001875181 | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.description.journalRegisteredClass | kci | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | GAS-DIFFUSION BARRIERS | - |
dc.subject.keywordPlus | FILM ENCAPSULATION | - |
dc.subject.keywordPlus | CHEMISTRY | - |
dc.subject.keywordPlus | ZRO2 | - |
dc.subject.keywordAuthor | Remote plasma atomic layer deposition | - |
dc.subject.keywordAuthor | Encapsulation | - |
dc.subject.keywordAuthor | Al2O3 | - |
dc.subject.keywordAuthor | ZrO2 | - |
dc.identifier.url | https://www.sciencedirect.com/science/article/pii/S1567173913004367?via%3Dihub | - |
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