Nanowire-integrated microporous silicon membrane for continuous fluid transport in micro cooling device
- Authors
- So, Hong yun; Cheng, Jim C.; Pisano, Albert P.
- Issue Date
- Oct-2013
- Publisher
- AMER INST PHYSICS
- Citation
- APPLIED PHYSICS LETTERS, v.103, no.16, pp.1 - 6
- Indexed
- SCIE
SCOPUS
- Journal Title
- APPLIED PHYSICS LETTERS
- Volume
- 103
- Number
- 16
- Start Page
- 1
- End Page
- 6
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/161703
- DOI
- 10.1063/1.4825169
- ISSN
- 0003-6951
- Abstract
- We report an efficient passive micro pump system combining the physical properties of nanowires and micropores. This nanowire-integrated microporous silicon membrane was created to feed coolant continuously onto the surface of the wick in a micro cooling device to ensure it remains hydrated and in case of dryout, allow for regeneration of the system. The membrane was fabricated by photoelectrochemical etching to form micropores followed by hydrothermal growth of nanowires. This study shows a promising approach to address thermal management challenges for next generation electronic devices with absence of external power.
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