Estimation of Thermal Conductivity of Amorphous Silicon Thin Films from the Optical Reflectivity Measurement
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Moon, Seung-Jae | - |
dc.contributor.author | Choi, Jung Hyun | - |
dc.date.accessioned | 2022-07-16T08:27:48Z | - |
dc.date.available | 2022-07-16T08:27:48Z | - |
dc.date.created | 2021-05-12 | - |
dc.date.issued | 2013-09 | - |
dc.identifier.issn | 1533-4880 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/162036 | - |
dc.description.abstract | Amorphous silicon (a-Si) thin film material is widely used in liquid crystal display and solar cell applications. Knowledge of its properties is important in enhancing device performance. The properties of a-Si thin film have not been well understood due to the lack of periodicity of the structure. Furthermore, thermal conductivity of a-Si thin film is a key parameter to understand the complex phase transformation mechanism from a-Si thin film to polysilicon thin film by analyzing the transient temperature during the laser recrystallization process. In this work, thermal conductivity of a-Si thin film was determined by measuring optical reflectivity. A-Si thin film was irradiated with a KrF excimer laser beam to raise its temperature. The raised film temperature affects temperature-dependent optical properties such as refractive indices and extinction coefficients. The temperature-dependent optical properties of refractive indices and extinction coefficients of a-Si thin film were measured by ellipsometry. In-situ transient reflectivity at the wavelength of 633 nm was obtained during the excimer laser irradiation. The numerical simulation of one-dimensional conduction equation was solved so that transient reflectivities were calculated with temperature-dependent optical properties combined with thin film optics. Therefore, a well-fitted thermal conductivity was determined by comparing the numerically obtained transient reflectivity with the experimentally measured reflectivity data. The determined thermal conductivity of a-Si thin films was 1.5 W/mk. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | AMER SCIENTIFIC PUBLISHERS | - |
dc.title | Estimation of Thermal Conductivity of Amorphous Silicon Thin Films from the Optical Reflectivity Measurement | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Moon, Seung-Jae | - |
dc.identifier.doi | 10.1166/jnn.2013.7712 | - |
dc.identifier.scopusid | 2-s2.0-84885437551 | - |
dc.identifier.wosid | 000323628900081 | - |
dc.identifier.bibliographicCitation | JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.13, no.9, pp.6362 - 6366 | - |
dc.relation.isPartOf | JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | - |
dc.citation.title | JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | - |
dc.citation.volume | 13 | - |
dc.citation.number | 9 | - |
dc.citation.startPage | 6362 | - |
dc.citation.endPage | 6366 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Chemistry | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
dc.subject.keywordPlus | CRYSTALLIZATION | - |
dc.subject.keywordPlus | DIAGNOSTICS | - |
dc.subject.keywordAuthor | Thermal Conductivity | - |
dc.subject.keywordAuthor | Optical Properties | - |
dc.subject.keywordAuthor | Amorphous Silicon | - |
dc.subject.keywordAuthor | Reflectivity | - |
dc.subject.keywordAuthor | Heat Conduction | - |
dc.identifier.url | https://www.ingentaconnect.com/content/asp/jnn/2013/00000013/00000009/art00081 | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
222, Wangsimni-ro, Seongdong-gu, Seoul, 04763, Korea+82-2-2220-1365
COPYRIGHT © 2021 HANYANG UNIVERSITY.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.