Characteristics of a-C/B:H films from non-toxic o-carborane vapor prepared by using DC glow discharges
DC Field | Value | Language |
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dc.contributor.author | Sun, Jong-Ho | - |
dc.contributor.author | Woo, Hyun-Jong | - |
dc.contributor.author | Chung, Kyu-Sun | - |
dc.contributor.author | Hong, Suk-Ho | - |
dc.date.accessioned | 2022-07-16T11:20:53Z | - |
dc.date.available | 2022-07-16T11:20:53Z | - |
dc.date.created | 2021-05-12 | - |
dc.date.issued | 2013-02 | - |
dc.identifier.issn | 0374-4884 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/163506 | - |
dc.description.abstract | A non-toxic boron-containing material, carborane (C2B10H12), has been utilized to deposit amorphous hydrogenated carbon/boron (a-C/B:H) thin films in helium DC glow discharges. The helium plasma was produced at a target pressure of similar to 5 mTorr in the pulsed mode at a duty cycle of 0.375 (3 s on/5 s off) or 0.23 (3 s on/10 s off) by using a filament discharge system connected with a carborane evaporation source. Deposited a-C/B:H thin films were characterized by using variable angle spectroscopic ellipsometry, scanning electron microscopy, Auger electron spectroscopy, and X-ray photoelectron spectroscopy. The a-C/B:H thin films have soft polymer-like characteristics with optical constants of n = 1.65 and k = 10(-3) at 632 nm, and the B/C ratio inside the bulk was similar to 2 for an similar to 60% boron contents. The evaporation characteristics of carborane powder under vacuum were also investigated. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | KOREAN PHYSICAL SOC | - |
dc.title | Characteristics of a-C/B:H films from non-toxic o-carborane vapor prepared by using DC glow discharges | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Chung, Kyu-Sun | - |
dc.identifier.doi | 10.3938/jkps.62.612 | - |
dc.identifier.scopusid | 2-s2.0-84874760940 | - |
dc.identifier.wosid | 000316004100012 | - |
dc.identifier.bibliographicCitation | JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.62, no.4, pp.612 - 618 | - |
dc.relation.isPartOf | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
dc.citation.title | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
dc.citation.volume | 62 | - |
dc.citation.number | 4 | - |
dc.citation.startPage | 612 | - |
dc.citation.endPage | 618 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.identifier.kciid | ART001750637 | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.description.journalRegisteredClass | kci | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Multidisciplinary | - |
dc.subject.keywordPlus | SILICON FILMS | - |
dc.subject.keywordPlus | BIAS VOLTAGE | - |
dc.subject.keywordPlus | BORON FILMS | - |
dc.subject.keywordPlus | DEPOSITION | - |
dc.subject.keywordPlus | BORONIZATION | - |
dc.subject.keywordPlus | TEMPERATURE | - |
dc.subject.keywordPlus | GROWTH | - |
dc.subject.keywordPlus | SUBSTRATE | - |
dc.subject.keywordPlus | TOKAMAK | - |
dc.subject.keywordPlus | CONFINEMENT | - |
dc.subject.keywordAuthor | Boron | - |
dc.subject.keywordAuthor | Thin film | - |
dc.subject.keywordAuthor | Carborane | - |
dc.identifier.url | https://link.springer.com/article/10.3938/jkps.62.612 | - |
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