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실리콘 카바이드(SiC) CMP 슬러리의 연구 동향
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 황희섭 | - |
| dc.contributor.author | 박진형 | - |
| dc.contributor.author | 박재근 | - |
| dc.contributor.author | 전명철 | - |
| dc.contributor.author | 이승석 | - |
| dc.contributor.author | 김장열 | - |
| dc.contributor.author | 김흥락 | - |
| dc.date.accessioned | 2022-07-16T15:48:40Z | - |
| dc.date.available | 2022-07-16T15:48:40Z | - |
| dc.date.created | 2021-05-13 | - |
| dc.date.issued | 2012-04 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/165775 | - |
| dc.language | 한국어 | - |
| dc.language.iso | ko | - |
| dc.publisher | 대한금속재료학회 | - |
| dc.title | 실리콘 카바이드(SiC) CMP 슬러리의 연구 동향 | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | 박재근 | - |
| dc.identifier.bibliographicCitation | 재료마당, v.25, no.2, pp.17 - 21 | - |
| dc.relation.isPartOf | 재료마당 | - |
| dc.citation.title | 재료마당 | - |
| dc.citation.volume | 25 | - |
| dc.citation.number | 2 | - |
| dc.citation.startPage | 17 | - |
| dc.citation.endPage | 21 | - |
| dc.type.rims | ART | - |
| dc.type.docType | 정기 학술지(note) | - |
| dc.description.journalClass | 2 | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | other | - |
| dc.identifier.url | https://kiss.kstudy.com/thesis/thesis-view.asp?key=3127791 | - |
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