Mesoporous Thin-Film on Highly-Sensitive Resonant Chemical Sensor for Relative Humidity and CO2 Detection
- Authors
- Lee, Hyunjoo J.; Park, Kwan Kyu; Kupnik, Mario; Melosh, Nicholas A.; Khuri-Yakub, Butrus T
- Issue Date
- Apr-2012
- Publisher
- AMER CHEMICAL SOC
- Citation
- ANALYTICAL CHEMISTRY, v.84, no.7, pp.3063 - 3066
- Indexed
- SCIE
SCOPUS
- Journal Title
- ANALYTICAL CHEMISTRY
- Volume
- 84
- Number
- 7
- Start Page
- 3063
- End Page
- 3066
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/165840
- DOI
- 10.1021/ac300225c
- ISSN
- 0003-2700
- Abstract
- Distributed sensing of gas-phase chemicals is a promising application for mesoporous materials when combined with highly sensitive miniaturized gas sensors. We present a direct application of a mesoporous silica thin film on a highly sensitive miniaturized resonant chemical sensor with a mass sensitivity at the zeptogram scale for relative humidity and CO2 detection. Using mesoporous silica thin-film, we report one of the lowest volume resolutions and a sensitive detection of 5.1 x 10(-4)% RH/Hz to water vapor in N-2, which is 70 times higher than a device with a nontemplated silica layer. In addition, a mesoporous thin-film that is functionalized with an amino-group is directly applied on the resonant sensor, which exhibits a volume sensitivity of 1.6 x 10(-4)%/Hz and a volume resolution of 1.82 x 10(-4)% to CO2 in N-2.
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