Chemical Vapor Detection Using a Capacitive Micromachined Ultrasonic Transducer
DC Field | Value | Language |
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dc.contributor.author | Lee, Hyunjoo J. | - |
dc.contributor.author | Park, Kwan Kyu | - |
dc.contributor.author | Kupnik, Mario | - |
dc.contributor.author | Oralkan, Oe | - |
dc.contributor.author | Khuri-Yakub, Butrus T. | - |
dc.date.accessioned | 2022-07-16T17:35:14Z | - |
dc.date.available | 2022-07-16T17:35:14Z | - |
dc.date.created | 2021-05-13 | - |
dc.date.issued | 2011-12 | - |
dc.identifier.issn | 0003-2700 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/166756 | - |
dc.description.abstract | Distributed sensing of gas-phase chemicals using highly sensitive and inexpensive sensors is of great interest for many defense and consumer applications. In this paper we present ppb-level detection of dimethyl methylphosphonate (DMMP), a common simulant for sarin gas, with a ppt-level resolution using an improved capacitive micromachined ultrasonic transducer (CMUT) as a resonant chemical sensor. The improved CMUT operates at a higher resonant frequency of 47.7 MHz and offers an improved mass sensitivity of 48.8 zg/Hz/mu m(2) by a factor of 2.7 compared to the previous CMUT sensors developed. A low-noise oscillator using the CMUT resonant sensor as the frequency-selective device was developed for real-time sensing, which exhibits an Allan deviation of 1.65 Hz (3 sigma) in the presence of a gas flow; this translates into a mass resolution of 80.5 zg/mu m(2). The CMUT resonant sensor is functionalized with a 50-nm thick DKAP polymer developed at Sandia National Laboratory for dimethyl methylphosphonate (DMMP) detection. To demonstrate ppb-level detection of the improved chemical sensor system, the sensor performance was tested at a certified lab (MIT Lincoln Laboratory), which is equipped with an experimental chemical setup that reliably and accurately delivers a wide range of low concentrations down to 10 ppb. We report a high volume sensitivity of 34.5 +/- 0.79 pptv/Hz to DMMP and a good selectivity of the polymer to DMMP with respect to dodecane and 1-octanol. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | AMER CHEMICAL SOC | - |
dc.title | Chemical Vapor Detection Using a Capacitive Micromachined Ultrasonic Transducer | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Park, Kwan Kyu | - |
dc.identifier.doi | 10.1021/ac201626b | - |
dc.identifier.scopusid | 2-s2.0-83655164815 | - |
dc.identifier.wosid | 000297946900020 | - |
dc.identifier.bibliographicCitation | ANALYTICAL CHEMISTRY, v.83, no.24, pp.9314 - 9320 | - |
dc.relation.isPartOf | ANALYTICAL CHEMISTRY | - |
dc.citation.title | ANALYTICAL CHEMISTRY | - |
dc.citation.volume | 83 | - |
dc.citation.number | 24 | - |
dc.citation.startPage | 9314 | - |
dc.citation.endPage | 9320 | - |
dc.type.rims | ART | - |
dc.type.docType | 정기학술지(Article(Perspective Article포함)) | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Chemistry | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Analytical | - |
dc.subject.keywordPlus | OSCILLATORS | - |
dc.subject.keywordPlus | FREQUENCY | - |
dc.subject.keywordPlus | SENSOR | - |
dc.identifier.url | https://pubs.acs.org/doi/10.1021/ac201626b | - |
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