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Effect of Nonionic Polymer as Corrosion Inhibitor in Alkaline Media for Polycrystalline Ge2Sb2Te5 Chemical Mechanical Planarization
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Cho, Jong-Young | - |
| dc.contributor.author | Cui, Hao | - |
| dc.contributor.author | Park, Jin-Hyung | - |
| dc.contributor.author | Park, Hyung-Soon | - |
| dc.contributor.author | Park, Jea-Gun | - |
| dc.date.accessioned | 2022-07-16T19:07:31Z | - |
| dc.date.available | 2022-07-16T19:07:31Z | - |
| dc.date.issued | 2011-09 | - |
| dc.identifier.issn | 1099-0062 | - |
| dc.identifier.issn | 1944-8775 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/167644 | - |
| dc.description.abstract | The corrosion inhibition effect of different nonionic polymers, which are polyacrylamide (PAM), polyvinyl pyrrolidone (PVP), and polyvinyl alcohol (PVA), on polycrystalline Ge2Sb2Te5 (pc-GST) was investigated in an alkaline media for chemical mechanical planarization. The adsorption affinity and inhibition effect of nonionic polymers on pitting corrosion were observed using x-ray photoelectron spectroscopy and a potentiodynamic polarization curve, respectively. We found that PVP was more effective than the others in inhibiting the pitting corrosion of pc-GST film in the alkaline media. | - |
| dc.language | 영어 | - |
| dc.language.iso | ENG | - |
| dc.publisher | Electrochemical Society, Inc. | - |
| dc.title | Effect of Nonionic Polymer as Corrosion Inhibitor in Alkaline Media for Polycrystalline Ge2Sb2Te5 Chemical Mechanical Planarization | - |
| dc.type | Article | - |
| dc.publisher.location | 미국 | - |
| dc.identifier.doi | 10.1149/2.007111esl | - |
| dc.identifier.scopusid | 2-s2.0-80053487940 | - |
| dc.identifier.wosid | 000295284800015 | - |
| dc.identifier.bibliographicCitation | Electrochemical and Solid-State Letters, v.14, no.11, pp H450 - H452 | - |
| dc.citation.title | Electrochemical and Solid-State Letters | - |
| dc.citation.volume | 14 | - |
| dc.citation.number | 11 | - |
| dc.citation.startPage | H450 | - |
| dc.citation.endPage | H452 | - |
| dc.type.docType | Article | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | sci | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.relation.journalResearchArea | Electrochemistry | - |
| dc.relation.journalResearchArea | Materials Science | - |
| dc.relation.journalWebOfScienceCategory | Electrochemistry | - |
| dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
| dc.subject.keywordPlus | Adsorption | - |
| dc.subject.keywordPlus | Alkalinity | - |
| dc.subject.keywordPlus | Antimony | - |
| dc.subject.keywordPlus | Germanium | - |
| dc.subject.keywordPlus | Pitting | - |
| dc.subject.keywordPlus | Polymers | - |
| dc.subject.keywordPlus | X ray photoelectron spectroscopy | - |
| dc.identifier.url | https://iopscience.iop.org/article/10.1149/2.007111esl | - |
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