Advances in Chemical Mechanical Planarization (CMP)
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 백운규 | - |
dc.date.accessioned | 2022-07-18T01:20:56Z | - |
dc.date.available | 2022-07-18T01:20:56Z | - |
dc.date.issued | 2022-01 | - |
dc.identifier.isbn | 9780128217917 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/169753 | - |
dc.format.extent | 32 | - |
dc.publisher | Woodhead Publishing | - |
dc.title | Advances in Chemical Mechanical Planarization (CMP) | - |
dc.type | Book | - |
dc.contributor.affiliatedAuthor | 백운규 | - |
dc.type.rims | BOOK | - |
dc.type.docType | 저서 | - |
dc.description.isChapter | TRUE | - |
dc.description.release | 개정 | - |
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