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유도 결합 플라즈마 이온 주입 장치 구조 열 전달 해석
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 문승재 | - |
| dc.date.accessioned | 2022-08-02T10:31:02Z | - |
| dc.date.available | 2022-08-02T10:31:02Z | - |
| dc.date.issued | 2021-11-30 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/170416 | - |
| dc.title | 유도 결합 플라즈마 이온 주입 장치 구조 열 전달 해석 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2021 동계학술발표대회 | - |
| dc.citation.conferencePlace | 세종대학교 컨벤션센터 | - |
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Collections - 서울 공과대학 > 서울 기계공학부 > 2. Conference Papers
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Related Researcher
- Moon, Seung Jae
- COLLEGE OF ENGINEERING (SCHOOL OF MECHANICAL ENGINEERING)