Ultrathin barium titanate films by polyol thermal decomposition processopen access
- Authors
- Lee, Hyeong Seok; Koo, Sang Man; Yoo, Jung Whan
- Issue Date
- Nov-2010
- Publisher
- SPRINGER
- Citation
- JOURNAL OF MATERIALS SCIENCE, v.45, no.22, pp.6275 - 6279
- Indexed
- SCIE
SCOPUS
- Journal Title
- JOURNAL OF MATERIALS SCIENCE
- Volume
- 45
- Number
- 22
- Start Page
- 6275
- End Page
- 6279
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/173499
- DOI
- 10.1007/s10853-010-4850-4
- ISSN
- 0022-2461
- Abstract
- We have successfully fabricated barium titanate (BaTiO3) films on Si (100) and Pt(111)/Ti/SiO2/Si substrates using the polyol thermal decomposition (PTD) process by spin-coating technique. In PTD process, we confirmed that the crystalline oxycarbonate Ba2Ti2O5CO3 films were directly formed as a consequence of evaporation of polyol precursor solution prepared simply by mixing metal chlorides and ethylene glycol, and then converting them into crystalline BaTiO3 films through thermal decomposition at > 500 A degrees C. This feature makes it possible to grow densely packed and crack-free BaTiO3 films as thin as 70 per cycle. Although PTD is described here for a complex metal-oxide film of BaTiO3, other simple and complex metal-oxide thin films with high-dielectric constant materials are also likely to be suitable for deposition with accurate control of film thickness and composition using the polyol precursor solutions.
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