MoO3 thin film synthesis by chemical vapor transport of volatile MoO3(OH)(2)

Abstract

Molybdenum oxide thin films with good adhesion and crystallinity were homogeneously deposited by the Chemical vapor transport of MoO3(OH)(2) and subsequent dehydration to the Mo oxide phase during hydrogen-reduction. This new deposition technique would be an effective deposition method for MoO3 thin films due to the simple, low-cost, large area deposition and eco-friendly process. The surface morphology dramatically changed by thermal annealing at different temperatures and a uniform similar to 1 mu m thickness was obtained. The effect of the annealing temperature is discussed.