Curing Conditions for the Synthesis of In2O3 Nanoparticles in Polyimide

Abstract

We fabricated In2O3 nanoparticles embedded in polyimide and we controlled their size and distribution by varying the curing temperature and the chemical reaction time between the indium film and the polyamic acid. Their size and distribution were measured by using transmission electron microscopy, and ultraviolet visible spectrophotometer did riot show an obvious relation of the size and distribution and the curing temperature. However, the particle size was strongly affected by the chemical reaction time. The electrical property was also characterized by using capacitance-voltage (C-V) measurements, and the flat-band voltage shift due to the charging effect of In2O3 nanoparticles was 3.7 V at voltage sweeping of 8 V. The best synthesis conditions for the In2O3 nanoparticles for the carrier charging effect were found to be a 24-hr reaction time and a 400 degrees C curing temperature.