Molecular layer deposition of ZrO2-based organic-inorganic nanohybrid thin films for organic thin film transistors
DC Field | Value | Language |
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dc.contributor.author | Lee, Byoung H. | - |
dc.contributor.author | Im, Kyo K. | - |
dc.contributor.author | Lee, Kwang H. | - |
dc.contributor.author | Im, Seongil | - |
dc.contributor.author | Sung, Myung M. | - |
dc.date.accessioned | 2022-12-20T22:28:23Z | - |
dc.date.available | 2022-12-20T22:28:23Z | - |
dc.date.created | 2022-08-26 | - |
dc.date.issued | 2009-05 | - |
dc.identifier.issn | 0040-6090 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/176881 | - |
dc.description.abstract | Molecular layer deposition (MLD) technique can be used for preparation of various organic-inorganic nanohybrid superlattices at a gas-phase. The MLD method is a self-controlled layer-by-layer growth process under vacuum conditions, and is perfectly compatible with the atomic layer deposition (ALD) method. In this paper, we fabricated a new type organic-inorganic nanohybrid thin film using MLD method combined with ALD. A self-assembled organic layer (SAOL) was formed at 170 degrees C using MLD with repeated sequential adsorptions of C=C terminated alkylsilane and zirconium hydroxyl with ozone activation. A ZrO2 inorganic nanolayer was deposited at the same temperature using ALD with alternating surface-saturating reactions of Zr(OC(CH3)(3))(4) and H2O. The prepared SAOL-ZrO2 organic-inorganic nanohybrid films exhibited good mechanical stability, excellent insulating properties, and relatively high dielectric constant k (similar to 16). They were then used as a 23 nm-thick dielectric for low voltage pentacene-based thin film transistors, which showed a maximum field effect mobility of 0.63 cm(2)/V s, operating at - 1 V with an on/off current ratio of similar to 10(3). | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | ELSEVIER SCIENCE SA | - |
dc.title | Molecular layer deposition of ZrO2-based organic-inorganic nanohybrid thin films for organic thin film transistors | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Sung, Myung M. | - |
dc.identifier.doi | 10.1016/j.tsf.2009.01.173 | - |
dc.identifier.scopusid | 2-s2.0-65449160456 | - |
dc.identifier.wosid | 000266696100059 | - |
dc.identifier.bibliographicCitation | THIN SOLID FILMS, v.517, no.14, pp.4056 - 4060 | - |
dc.relation.isPartOf | THIN SOLID FILMS | - |
dc.citation.title | THIN SOLID FILMS | - |
dc.citation.volume | 517 | - |
dc.citation.number | 14 | - |
dc.citation.startPage | 4056 | - |
dc.citation.endPage | 4060 | - |
dc.type.rims | ART | - |
dc.type.docType | Article; Proceedings Paper | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Coatings & Films | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
dc.subject.keywordPlus | SELF-ASSEMBLED MONOLAYERS | - |
dc.subject.keywordPlus | GAS-PHASE OZONE | - |
dc.subject.keywordAuthor | Organic-inorganic nanohybrid thin films | - |
dc.subject.keywordAuthor | Molecular layer deposition | - |
dc.subject.keywordAuthor | Atomic layer deposition | - |
dc.subject.keywordAuthor | Self-assembled organic monolayers | - |
dc.subject.keywordAuthor | Organic thin film transistor | - |
dc.identifier.url | https://www.sciencedirect.com/science/article/pii/S0040609009002314?via%3Dihub | - |
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