Optical properties of molybdenum oxide thin films deposited by chemical vapor transport of MoO3(OH)2

Abstract

MoO3 thin film is useful for the optical devices due to its electrochromic properties. In this study, MoO2 thin film was successfully deposited by the chemical vapor transport (CVT) of the volatile MoO3(OH)2 and subsequently, MoO3 thin film was obtained through the annealing of the deposited MoO2 thin film at 400°C in O2 atmosphere. The optical transmittance increased and absorbance peak were broadened and red-shifted as the annealing time increased reducing oxygen deficiency. CVT technique could be applied the one of technique for the deposition of molybdenum oxides thin film.