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Enhanced the electrical properties of Zr1-xHfxO2 with Al doping using atomic layer deposition

Authors
안지훈
Issue Date
20220518
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/178929
Conference Name
2022년도 한국재료학회 춘계학술대회
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서울 의과대학 > 서울 내과학교실 > 1. Journal Articles

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Ahn, Ji Hoon
ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)
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