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Design of mask grating for obtaining the effect of an off-axis illumination in optical lithography
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Young-Seok | - |
| dc.contributor.author | Song, Seok Ho | - |
| dc.contributor.author | Oh, Sung Hyun | - |
| dc.contributor.author | Choi, Yong Kyu | - |
| dc.contributor.author | O, Beom Hoan | - |
| dc.contributor.author | Park, Se Geun | - |
| dc.contributor.author | Lee, El Hang | - |
| dc.contributor.author | Lee, Seung Gol | - |
| dc.date.accessioned | 2022-12-21T06:52:04Z | - |
| dc.date.available | 2022-12-21T06:52:04Z | - |
| dc.date.created | 2022-09-16 | - |
| dc.date.issued | 2007-08 | - |
| dc.identifier.issn | 0000-0000 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/179720 | - |
| dc.description.abstract | We proposed the new method for obtaining the effect of an off-axis illumination by using a mask grating formed on the photo mask. The grating structure was designed from the source distribution in the conventional off-axis illumination and the rigorous diffraction theory. Its performance was characterized with simulated Bossung curve. | - |
| dc.language | 영어 | - |
| dc.language.iso | en | - |
| dc.publisher | IEEE | - |
| dc.title | Design of mask grating for obtaining the effect of an off-axis illumination in optical lithography | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | Song, Seok Ho | - |
| dc.identifier.doi | 10.1109/CLEOPR.2007.4391349 | - |
| dc.identifier.scopusid | 2-s2.0-51549116677 | - |
| dc.identifier.bibliographicCitation | Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, pp.1 - 2 | - |
| dc.relation.isPartOf | Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest | - |
| dc.citation.title | Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest | - |
| dc.citation.startPage | 1 | - |
| dc.citation.endPage | 2 | - |
| dc.type.rims | ART | - |
| dc.type.docType | Conference Paper | - |
| dc.description.journalClass | 1 | - |
| dc.description.isOpenAccess | N | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.subject.keywordPlus | Lithography | - |
| dc.subject.keywordPlus | Electro-optics | - |
| dc.subject.keywordPlus | Off-axis-illumination | - |
| dc.subject.keywordPlus | Pacific Rim | - |
| dc.subject.keywordPlus | Light | - |
| dc.identifier.url | https://ieeexplore.ieee.org/document/4391349 | - |
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Related Researcher
- Song, Seok Ho
- COLLEGE OF NATURAL SCIENCES (DEPARTMENT OF PHYSICS)