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Study on the electrical properties of direct-patternable SBT films formed by photochemical metal-organic deposition

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dc.contributor.authorPark, Hyeong-Ho-
dc.contributor.authorChang, Ho Jung-
dc.contributor.authorJeon, Hyeongtag-
dc.date.accessioned2022-12-21T09:29:22Z-
dc.date.available2022-12-21T09:29:22Z-
dc.date.created2022-09-16-
dc.date.issued2007-01-
dc.identifier.issn0255-5476-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/180541-
dc.description.abstractThe ferroelectric properties of UV irradiated and non-irradiated SBT thin films using photosensitive starting precursors were investigated. The observation of surface microstructure showed that UV irradiation and increase in anneal temperature induced the grain growth of SBT. The measured remnant polarization values of UV irradiated and non-irradiated SBT films after anneal at 700°C were 5.8 and 4.7 μC/cm2 and after anneal at 750°C, the values were 10.8 and 9.3 μC/cm2, respectively.-
dc.language영어-
dc.language.isoen-
dc.publisherTrans Tech Publications Ltd-
dc.titleStudy on the electrical properties of direct-patternable SBT films formed by photochemical metal-organic deposition-
dc.typeArticle-
dc.contributor.affiliatedAuthorJeon, Hyeongtag-
dc.identifier.doi10.4028/www.scientific.net/MSF.544-545.1061-
dc.identifier.scopusid2-s2.0-38349136258-
dc.identifier.bibliographicCitationMaterials Science Forum, v.544-545, pp.1061 - 1064-
dc.relation.isPartOfMaterials Science Forum-
dc.citation.titleMaterials Science Forum-
dc.citation.volume544-545-
dc.citation.startPage1061-
dc.citation.endPage1064-
dc.type.rimsART-
dc.type.docTypeConference Paper-
dc.description.journalClass1-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClassscopus-
dc.subject.keywordPlusAnnealing-
dc.subject.keywordPlusMetallorganic chemical vapor deposition-
dc.subject.keywordPlusMicrostructure-
dc.subject.keywordPlusRemanence-
dc.subject.keywordPlusThin films-
dc.subject.keywordPlusUltraviolet radiation-
dc.subject.keywordPlusDirect-patterning-
dc.subject.keywordPlusPhotoresist-free-
dc.subject.keywordPlusSBT films-
dc.subject.keywordPlusPhotochemical reactions-
dc.subject.keywordAuthorDirect-patterning-
dc.subject.keywordAuthorPhotochemical reaction-
dc.subject.keywordAuthorPhotoresist-free-
dc.subject.keywordAuthorSBT-
dc.subject.keywordAuthorUV irradiation-
dc.identifier.urlhttps://www.scientific.net/MSF.544-545.1061-
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