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The incident angle effect of al adatom on the growth morphology of Al/Ni(001) system: Molecular dynamics simulation

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dc.contributor.authorLee, Soon-gun-
dc.contributor.authorChung, Yong Chae-
dc.date.accessioned2022-12-21T11:20:10Z-
dc.date.available2022-12-21T11:20:10Z-
dc.date.created2022-09-16-
dc.date.issued2006-05-
dc.identifier.issn0000-0000-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/181479-
dc.description.abstractThe deposition behavior of Al atoms on Ni(001) substrate for various adatom incident angle and incident energy is investigated in this study using molecular dynamics simulation to investigate the growth morphology and the quality of thin film in atomic level. Results show that the surface roughness is comparatively decreased irrespective of adatom incident angle at the incident energy of 6 eV.-
dc.language영어-
dc.language.isoen-
dc.publisherIEEE-
dc.titleThe incident angle effect of al adatom on the growth morphology of Al/Ni(001) system: Molecular dynamics simulation-
dc.typeArticle-
dc.contributor.affiliatedAuthorChung, Yong Chae-
dc.identifier.doi10.1109/INTMAG.2006.375667-
dc.identifier.scopusid2-s2.0-50249098566-
dc.identifier.bibliographicCitationINTERMAG 2006 - IEEE International Magnetics Conference, pp.167 - 167-
dc.relation.isPartOfINTERMAG 2006 - IEEE International Magnetics Conference-
dc.citation.titleINTERMAG 2006 - IEEE International Magnetics Conference-
dc.citation.startPage167-
dc.citation.endPage167-
dc.type.rimsART-
dc.type.docTypeConference Paper-
dc.description.journalClass1-
dc.description.isOpenAccessN-
dc.description.journalRegisteredClassscopus-
dc.subject.keywordPlusSurface morphology-
dc.subject.keywordPlusRough surfaces-
dc.subject.keywordPlusSurface roughness-
dc.subject.keywordPlusAtomic layer deposition-
dc.subject.keywordPlusSubstrates-
dc.subject.keywordPlusAcceleration-
dc.subject.keywordPlusAtomic measurements-
dc.subject.keywordPlusSputtering-
dc.subject.keywordPlusCeramics-
dc.subject.keywordPlusPower engineering and energy-
dc.identifier.urlhttps://ieeexplore.ieee.org/document/4261601-
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