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Effect of oxygen plasma power control on the Hafnium oxide thin film using plasma-enhanced atomic layer deposition
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2023-04-03T20:43:06Z | - |
| dc.date.available | 2023-04-03T20:43:06Z | - |
| dc.date.issued | 2022-05-27 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/184617 | - |
| dc.title | Effect of oxygen plasma power control on the Hafnium oxide thin film using plasma-enhanced atomic layer deposition | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2022년 한국반도체디스플레이기술학회 춘계학술대회 | - |
| dc.citation.conferencePlace | 인하대학교 | - |
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