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ALD Halo Metallic Tungsten by H2 Reduction with Non-Fluorinated Precursors
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2023-04-03T20:43:13Z | - |
| dc.date.available | 2023-04-03T20:43:13Z | - |
| dc.date.issued | 20221114 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/184619 | - |
| dc.title | ALD Halo Metallic Tungsten by H2 Reduction with Non-Fluorinated Precursors | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 22nd International Conference on Atomic Layer Deposition | - |
| dc.citation.conferencePlace | 파라다이스 호텔 부산 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Jeon, Hyeongtag
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)