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Effect of the ceria particle size on SiO2 film polishing rate by adjusting synthesis molar ratio
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박재근 | - |
| dc.date.accessioned | 2023-04-03T20:47:33Z | - |
| dc.date.available | 2023-04-03T20:47:33Z | - |
| dc.date.issued | 2022-04-22 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/184694 | - |
| dc.title | Effect of the ceria particle size on SiO2 film polishing rate by adjusting synthesis molar ratio | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2022 한국 물리학회 | - |
| dc.citation.conferencePlace | On-line | - |
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