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Scavenger with Protonated Phosphite Ion for Incredible Nanoscale ZrO2-Abrasive Dispersant Stability Enhancement and Related Tungsten-Film Surface Chemical–Mechanical Planarization
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박재근 | - |
| dc.date.accessioned | 2023-04-03T20:48:32Z | - |
| dc.date.available | 2023-04-03T20:48:32Z | - |
| dc.date.issued | 2022-11-14 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/184711 | - |
| dc.title | Scavenger with Protonated Phosphite Ion for Incredible Nanoscale ZrO2-Abrasive Dispersant Stability Enhancement and Related Tungsten-Film Surface Chemical–Mechanical Planarization | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | Korean international semiconductor conference on manufactureing technology 2022 | - |
| dc.citation.conferencePlace | 부산 | - |
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