Fabrication of parabolic Si nanostructures by nanosphere lithography and its application for solar cells
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Cheon, See-Eun | - |
dc.contributor.author | Lee, Hyeon-seung | - |
dc.contributor.author | Choi, Jihye | - |
dc.contributor.author | Jeong, Ah Reum | - |
dc.contributor.author | Lee, Taek Sung | - |
dc.contributor.author | Jeong, Doo Seok | - |
dc.contributor.author | Lee, Kyeong-Seok | - |
dc.contributor.author | Lee, Wook-Seong | - |
dc.contributor.author | Kim, Won Mok | - |
dc.contributor.author | Lee, Heon | - |
dc.contributor.author | Kim, Inho | - |
dc.date.accessioned | 2021-08-02T14:25:53Z | - |
dc.date.available | 2021-08-02T14:25:53Z | - |
dc.date.created | 2021-05-14 | - |
dc.date.issued | 2017-12 | - |
dc.identifier.issn | 2045-2322 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/18528 | - |
dc.description.abstract | We demonstrated fabrication of a parabola shaped Si nanostructures of various periods by combined approach of nanosphere lithography and a single step CF₄/O₂ reactive ion etch (RIE) process. Silica nanosphere monolayers in a hexagonal array were well deposited by a solvent controlled spin coating technique based on binary organic solvents. We showed numerically that a parabolic Si nanostructure of an optimal period among various-shaped nanostructures overcoated with a dielectric layer of a 70 nm thickness provide the most effective antireflection. As the simulation results as a design guide, we fabricated the parabolic Si nanostructures of a 520 nm period and a 300 nm height exhibiting the lowest weighted reflectance of 2.75%. With incorporation of such parabolic Si nanostructures, a damage removal process for 20 sec and SiNx antireflection coating of a 70 nm thickness, the efficiency of solar cells increased to 17.2% while that of the planar cells without the nanostructures exhibited 16.2%. The efficiency enhancement of the cell with the Si nanostructures was attributed to the improved photocurrents arising from the broad spectral antireflection which was confirmed by the external quantum efficiency (EQE) measurements. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | NATURE PUBLISHING GROUP | - |
dc.title | Fabrication of parabolic Si nanostructures by nanosphere lithography and its application for solar cells | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Jeong, Doo Seok | - |
dc.identifier.doi | 10.1038/s41598-017-07463-7 | - |
dc.identifier.scopusid | 2-s2.0-85026811775 | - |
dc.identifier.wosid | 000406980800075 | - |
dc.identifier.bibliographicCitation | SCIENTIFIC REPORTS, v.7, pp.1 - 10 | - |
dc.relation.isPartOf | SCIENTIFIC REPORTS | - |
dc.citation.title | SCIENTIFIC REPORTS | - |
dc.citation.volume | 7 | - |
dc.citation.startPage | 1 | - |
dc.citation.endPage | 10 | - |
dc.type.rims | ART | - |
dc.type.docType | 정기학술지(Article(Perspective Article포함)) | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | Y | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
dc.relation.journalWebOfScienceCategory | Multidisciplinary Sciences | - |
dc.subject.keywordPlus | HIGH-EFFICIENCY | - |
dc.subject.keywordPlus | SILICON NANOWIRE | - |
dc.subject.keywordPlus | BROAD-BAND | - |
dc.subject.keywordPlus | PARTICLES | - |
dc.subject.keywordPlus | DESIGN | - |
dc.identifier.url | https://www.nature.com/articles/s41598-017-07463-7 | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
222, Wangsimni-ro, Seongdong-gu, Seoul, 04763, Korea+82-2-2220-1365
COPYRIGHT © 2021 HANYANG UNIVERSITY.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.